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UltraLo-1800超低本底α計數器

產品詳情

       

      

UltraLO-1800超低本底α計數器用于低阿爾法材料(low Alpha)和極低阿爾法材料(Ultra low Alpha)的檢測,檢測材料的α輻射率,如半導體、微電子、集成電路等領域的晶圓片、焊接材料、封裝材料、PCB材料等?;谄洫毺氐膬炔拷Y構設計和強大的算法,可以有效的識別和區分α測量中的有效信號和設備本底信號,并在處理數據時將本底信號直接去除,相當于達到等效本底0.0001 alpha/cm2/hr甚至更低,進而極大的縮短測量時間(可在10小時內完成0.001-0.0005 alpha/cm2/hr輻射率材料的檢測;在100小時內完成小于0.0005 alpha/cm2/hr輻射率材料的檢測)。

UltraLO-1800也可用于物理研究中的“罕見事件”測量和環保相關的研究。



 

 

 

 

 

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Counting system includes:


  • Counting Module. Sample handling, meas-urement chamber, si-gnal processing elect-ronics.

  • Support Box. Power supplies, gas control, etc.

  • Laptop. Windows 7 professional, x64

UltraLo-1800產品縮略圖1.jpg

 

Performance category

Specification

Required counting time for measurement of ULA (0.001)   sample1

(50%) 6 hrs, (25%) 24hrs, (12.5%) 90 hrs --   (measurement accuracy) time

Required counting time for measurement of LA (0.01)   sample1

(50%) 30 min, (25%) 2.5 hrs, (12.5%) 9 hrs --   (measurement accuracy) time

Typical counter efficiency

> 90% of 2π

Energy resolution (230Th source)

< 9% FWHM (at 4.6 MeV)

Energy sensitivity range

1-10 MeV

Sample sizes (typical min - max)

300mm wafer (707cm2) - 1800cm2

1 – Sample assumed to be 300mm wafer (count times drop by factor of 2.5 when using max sample area)

 


 

 

 

 

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Highlighted Features

Robust Data Management: Easily access and review both current

and historical measurement data.

Data Export: Generate and save datasets in convenient ASCII

format.

Report Generation: Measurement results saved to PDF reports.

System Health Information: Monitor system noise levels, gas flow rate, operating bias and more.

 

 

 

 

Requirements

Specification

Minimum sample size (typical)

300mm wafer (707cm2)

Maximum sample size

1800cm2

Maximum sample weight

20 lbs (9 kg)

Maximum sample thickness

0.25 in (6.3 mm)

Counting Gas

Argon

Gas pressure

21psi (150kPa) ±5%

Line Voltage

100-240 (VAC) 50/60 Hz

Power Consumption (Instrument)

50 W (100 W maximum)

Power Consumption (Laptop)

30 W

System dimensions (L x W x H)

65 in x 35 in x 27 in   (165 cm x 89 cm x 69 cm)

Weight

360 lb (163 kg)


 

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